Design and simulation of a MEM pressure microgripper based on electrothermal microactuators

Design and simulation of a novel pressure microgripper based on Microelectromechanical, MEM technology, and composed by several electrothermal microactuators were carried out in order to increment the displacement and the cutoff force. The implementation of an element of press or gripping in the arrow of chevron actuator was implemented to supply stability in the manipulation of micro-objects. Each device of the microgripper and its fundamental equations will be described. The fundamental parameters to understand the operation and behaviour of the device are analyzed through sweeps of temperature (from 30 °C up to 100 °C) and voltage (from 0.25 V up to 5 V), showing the feasibility to operate the microgripper with electrical or thermal feeding. The design and simulation were development with Finite Element Method (FEM) in Ansys-Workbench 16.0. In this work, the fundamental parameters were calculated in Ansys-Workbench. It is shown, that structural modifications have great impact in the displacement and the cut-off force of the microgripper.