低通量电子辐照和弱磁场对硅显微硬度的综合影响

Nanodesign, Technology, and Computer Simulations Pub Date : 2008-07-11 DOI:10.1117/12.836914

Y. Golovin, A. Dmitrievskiy, N. Efremova, V. M. Vasyukov

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引用次数: 0

摘要

研究了低通量电子辐照和弱磁场、弱电场对硅单晶显微硬度的综合影响。结果表明，相对于电导率，显微硬度对低剂量辐照更为敏感。揭示了磁场和电场对二次辐射缺陷产生过程的影响。

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The combined influence of low-flux electrons irradiation and weak magnetic field on silicon microhardness

The combined influence of low-flux electron irradiation and weak magnetic and electric fields on silicon single-crystal microhardness was investigated. It is shown that the microhardness is more sensitive to low-doses effects irradiation than conductivity. The effect of magnetic and electric fields on the process of secondary radiation defects generation was revealed.

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Nanodesign, Technology, and Computer Simulations

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