基于光子晶体的功能光学结构的制备

A. Scherer, A. Yariv, Y. Fainman, E. Yablonovitch, B. D’Urso, O. Painter, C. Cheng
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引用次数: 0

摘要

我们已经开发了在功能半导体材料中制造光子晶体的技术,以反射、偏振光和滤光。这些可制造的结构现在使我们能够定义高对比度偏振分束器和超小型光学腔,并有望实现许多令人兴奋的新应用。通过一维多层Bragg反射镜微加工光栅,制备了TE/TM透射比超过880:1的偏振光片,从而形成了平面内二维光子带隙晶体。通过在非常薄的InGaAsP/InGaAs薄膜上穿孔,用二维光子晶体来定义平面内光学谐振腔,也定义了超小型光学腔。在这里,我们将描述这些器件的制造方法和观察到的性能。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Fabrication of Functional Optical Structures Based On Photonic Crystals
We have developed techniques to fabricate photonic crystals within functional semiconductor materials to reflect, polarise, and filter light. These manufacturable structures have now allowed us to define high-contrast polarizing beam-splitters and ultra-small optical cavities, and hold the promise of many exciting new applications. Polarizers with over 820:1 TE/TM transmission ratios have been fabricated by microfabricating gratings through a 1-D multilayer Bragg mirror, thereby forming an in-plane 2-D photonic bandgap crystal. Ultra-small optical cavities have also been defined by perforating very thin InGaAsP/InGaAs membranes with 2-D photonic crystals to define in-plane optical resonators. Here, we will describe the fabrication methods and the observed performance of these devices.
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