{"title":"集总元件阻抗标准","authors":"Dylan F. Williams, D. Walker","doi":"10.1109/ARFTG.1998.327285","DOIUrl":null,"url":null,"abstract":"We measure the electrical parameters of commercial lumped-element impedance standards manufactured for the calibration of on-wafer probing systems. The standard¿s impedance depends not only on the standard itself, but also on probe placement, probe construction, and the reference calibration.","PeriodicalId":208002,"journal":{"name":"51st ARFTG Conference Digest","volume":"17 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"1998-06-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"3","resultStr":"{\"title\":\"Lumped-Element Impedance Standards\",\"authors\":\"Dylan F. Williams, D. Walker\",\"doi\":\"10.1109/ARFTG.1998.327285\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"We measure the electrical parameters of commercial lumped-element impedance standards manufactured for the calibration of on-wafer probing systems. The standard¿s impedance depends not only on the standard itself, but also on probe placement, probe construction, and the reference calibration.\",\"PeriodicalId\":208002,\"journal\":{\"name\":\"51st ARFTG Conference Digest\",\"volume\":\"17 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"1998-06-01\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"3\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"51st ARFTG Conference Digest\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/ARFTG.1998.327285\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"51st ARFTG Conference Digest","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/ARFTG.1998.327285","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
We measure the electrical parameters of commercial lumped-element impedance standards manufactured for the calibration of on-wafer probing systems. The standard¿s impedance depends not only on the standard itself, but also on probe placement, probe construction, and the reference calibration.
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