光纤位移传感器

P. Davis, J. Bush, G. Maurer
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引用次数: 16

摘要

研制了一种新型的低成本干涉式位移传感器,用于跟踪光纤探头尖端的距离。使用了一种独特的询问技术,产生32位相位字,使系统的动态范围大于109。因此,在6 mm的全范围内,可以实现小于0.01 nm的位移分辨率。测量范围可以扩展到10米以上,通过简单地调整数字条纹计数器,牺牲分辨率,但保持大于109的动态范围。已实现40 kHz的解调率,便于动态测量。介绍了应用于硬盘(HD)轮廓测量的结果。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Fiber optic displacement sensor
A novel low cost interferometric displacement sensor has been developed which tracks distance from the tip of a fiber optic probe. A unique interrogation technique is used which produces a 32-bit phase word, giving the system a dynamic range greater than 109. Therefore, a displacement resolution of less than 0.01 nm can be achieved with a full range of 6 mm. The measurement range can be extended beyond 10 m by simply adjusting the digital fringe counter and sacrificing resolution yet maintaining the greater than 109 dynamic range. Demodulation rates of 40 kHz have been achieved which facilitates dynamic measurements. Results from an application to hard disk (HD) profilometry are presented.
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