用于芯片上实验室应用的静电聚对二甲苯微阀

2010 15th National Biomedical Engineering Meeting Pub Date : 2010-04-21 DOI:10.1109/BIYOMUT.2010.5479784

E. Yıldırım, A. Koyuncuoğlu, H. Külah

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引用次数: 0

摘要

本文介绍了一种用于芯片实验室应用的新型静电驱动微阀，该微阀采用表面微加工技术制造。芯片实验室应用通常涉及平面内微流。这里提到的微阀是通过在静电力的帮助下移动与流体平面内垂直于流体的隔膜来工作的。本文介绍了该阀的工作原理和操作方法。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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An electrostatic parylene microvalve for lab-on-a-chip applications

This paper presents a novel electrostatically actuated microvalve for lab-on-a-chip applications, fabricated using surface micromachining techniques. Lab-on-a-chip applications generally involve in-plane microflows. Microvalve mentioned here operates by moving a diaphragm, which is in-plane with the flow, perpendicular to the stream with the help of electrostatic forces. Operating principles and the operation of the valve are presented in the paper.

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2010 15th National Biomedical Engineering Meeting

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