在金属氧化物半导体(mop)基础上开发高度敏感的纳米气体传感器

{"title":"在金属氧化物半导体(mop)基础上开发高度敏感的纳米气体传感器","authors":"Е. Шыныбеков, М. Сарсембина, А. Тұрлыбекұлы, Б. Солтабаев","doi":"10.51885/1561-4212_2022_4_254","DOIUrl":null,"url":null,"abstract":"","PeriodicalId":262621,"journal":{"name":"Bulletin of D. Serikbayev EKTU","volume":"53 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"1900-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"РАЗРАБОТКА ВЫСОКОЧУВСТВИТЕЛЬНЫХ НАНОРАЗМЕРНЫХ ГАЗОВЫХ СЕНСОРОВ НА ОСНОВЕ МЕТАЛЛООКСИДНЫХ ПОЛУПРОВОДНИКОВ (МОП)\",\"authors\":\"Е. Шыныбеков, М. Сарсембина, А. Тұрлыбекұлы, Б. Солтабаев\",\"doi\":\"10.51885/1561-4212_2022_4_254\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"\",\"PeriodicalId\":262621,\"journal\":{\"name\":\"Bulletin of D. Serikbayev EKTU\",\"volume\":\"53 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"1900-01-01\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Bulletin of D. Serikbayev EKTU\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.51885/1561-4212_2022_4_254\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Bulletin of D. Serikbayev EKTU","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.51885/1561-4212_2022_4_254","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}