用于液体传感应用的体声波谐振器的新型电极结构

2000 IEEE Ultrasonics Symposium. Proceedings. An International Symposium (Cat. No.00CH37121) Pub Date : 2000-10-22 DOI:10.1109/ULTSYM.2000.922586

C. Zhang, J. Vetelino

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引用次数: 4

摘要

设计、制作了多种不同电极结构的石英厚度剪切模式(TSM)谐振传感器，并在液体中进行了测试，以探测其电学特性的变化。发现传感器的谐振频率比标准AT切割石英谐振传感器的灵敏度增加了一个数量级以上。灵敏度的提高是由于传感器能够检测到液体中电性能的变化。

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Novel electrode configurations of bulk acoustic wave resonators for liquid sensing applications

A variety of quartz thickness shear mode (TSM) resonant sensors with different electrode configurations have been designed, fabricated and tested in liquids for probing the electrical property changes. The resonance frequency of the sensors was found to have more than an order of magnitude increase in sensitivity over the standard AT cut quartz resonant sensor. The increase in sensitivity is due to the ability of the sensors to detect changes in the electrical properties in the liquid.

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2000 IEEE Ultrasonics Symposium. Proceedings. An International Symposium (Cat. No.00CH37121)

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