Naoki Kawasaki, Bin Fan, K. Namiki, Yunglin Chang, Takayuki Kobayashi, Hyuga Taniguchi
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Accurate optical properties by simultaneous fitting of spectroscopic datasets of single- & multi-layers
We have developed an analytical method to determine accurate optical properties by a simultaneous fitting of spectroscopic measurements of single- and multilayers. Here, TiN and TiN/SiN samples are subjected to an evaluation of the method.
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