一种CMOS全集成低压振动微陀螺仪

Proceedings of IEEE Region 10 International Conference on Electrical and Electronic Technology. TENCON 2001 (Cat. No.01CH37239) Pub Date : 2001-08-19 DOI:10.1109/TENCON.2001.949708

Y.C. Liang, Tao Zhao, Y.P. Xu, S. S. Boh

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引用次数: 3

摘要

介绍了一种低压体微机械微陀螺仪。在同一硅片上集成了专用集成电路(ASIC)，最大限度地减少了寄生效应，保证了微陀螺仪的高灵敏度。对灵敏度和驱动电压的限制对用于航空航天应用的现代低速率高分辨率微陀螺仪至关重要。

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A CMOS fully-integrated low-voltage vibratory microgyroscope

A low-voltage bulk micromachined microgyroscope is presented in this paper. An ASIC (application specific integrated circuit) is integrated on the same silicon die to minimize the parasitic effect and to ensure the high sensitivity of the microgyroscope. Constraints on the sensitivity and actuation voltage are extremely crucial to modern low-rate high-resolution microgyroscopes used in aerospace applications.

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Proceedings of IEEE Region 10 International Conference on Electrical and Electronic Technology. TENCON 2001 (Cat. No.01CH37239)

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