{"title":"Si衬底上Bi2Sr2Ca1Cu2O7-x溅射薄膜的微观结构及分形生长机理","authors":"W. Qian, Liu Rong, Tongli Wei","doi":"10.1117/12.300695","DOIUrl":null,"url":null,"abstract":"Bi2Sr2Ca1Cu2O7-x(BSCCO) superconducting films were deposited on Si substrates with buffer layers of Y- stabilized ZrO2 films (YSZ) by magnetic sputtering. The critical temperature (Tc) of BSCCO film on YSZ/Si was 82 K. The microstructure of BSCCO/YSZ/Si was studied by scanning electronic microscope (SEM) and atom force microscope (AFM), the growing model of spiral nucleation was verified. Fractal images were found in the micrographs, and their growth mechanism was presented.","PeriodicalId":362287,"journal":{"name":"Thin Film Physics and Applications","volume":"150 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"1998-02-20","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Microstructure and fractal growth mechanism of sputtered films of Bi2Sr2Ca1Cu2O7-x on Si substrates\",\"authors\":\"W. Qian, Liu Rong, Tongli Wei\",\"doi\":\"10.1117/12.300695\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"Bi2Sr2Ca1Cu2O7-x(BSCCO) superconducting films were deposited on Si substrates with buffer layers of Y- stabilized ZrO2 films (YSZ) by magnetic sputtering. The critical temperature (Tc) of BSCCO film on YSZ/Si was 82 K. The microstructure of BSCCO/YSZ/Si was studied by scanning electronic microscope (SEM) and atom force microscope (AFM), the growing model of spiral nucleation was verified. Fractal images were found in the micrographs, and their growth mechanism was presented.\",\"PeriodicalId\":362287,\"journal\":{\"name\":\"Thin Film Physics and Applications\",\"volume\":\"150 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"1998-02-20\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Thin Film Physics and Applications\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1117/12.300695\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Thin Film Physics and Applications","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1117/12.300695","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
Microstructure and fractal growth mechanism of sputtered films of Bi2Sr2Ca1Cu2O7-x on Si substrates
Bi2Sr2Ca1Cu2O7-x(BSCCO) superconducting films were deposited on Si substrates with buffer layers of Y- stabilized ZrO2 films (YSZ) by magnetic sputtering. The critical temperature (Tc) of BSCCO film on YSZ/Si was 82 K. The microstructure of BSCCO/YSZ/Si was studied by scanning electronic microscope (SEM) and atom force microscope (AFM), the growing model of spiral nucleation was verified. Fractal images were found in the micrographs, and their growth mechanism was presented.
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