集成无源RC均衡器的紧凑型全硅分段马赫-曾德尔调制器的高速运行

2020 Optical Fiber Communications Conference and Exhibition (OFC) Pub Date : 2020-03-01 DOI:10.1364/ofc.2020.m2b.8

Y. Sobu, Shinsuke Tanaka, Yu Tanaka, Y. Akiyama, T. Hoshida

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引用次数: 6

摘要

实验验证了全硅分段调制器70Gbaud PAM4和90Gbaud NRZ的工作原理。MIM电容器的单片集成实现了43.9GHz的宽EO带宽和300×600µm2的小占地面积。

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High-Speed-Operation of Compact All-Silicon Segmented Mach-Zehnder Modulator Integrated with Passive RC Equalizer for Optical DAC Transmitter

We experimentally demonstrated 70Gbaud PAM4 and 90Gbaud NRZ operations of allsilicon segmented modulator for optical DAC transmitter. Monolithic integration of MIM capacitor enabled broad EO bandwidth of 43.9GHz and small footprint of 300×600µm2.

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2020 Optical Fiber Communications Conference and Exhibition (OFC)

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