A Polymer-Based Optical Switch Fabricated Using Silicon Process, Electroplating And Micro Hot Embossing

This paper presents an 8×8 optical switch consisting of a micro cantilever array. Each cantilever, with a vertical micro mirror located on one end of it, was driven by electrostatic actuation. The optical switch was fabricated using combined silicon process, electroplating and hot embossing. The optical switch, embossed with a polymer material, was aligned and assembled together with input and output optical fibers via grooves etched on a silicon substrate. Considering the fabrication process and material used, this optical switch is suitable for cost-effective mass production, and will potentially find wide applications for fiber-to-the-home communications.