镜面激光散射亮条纹的产生机理及抑制技术

International Conference on Photonics and Optical Engineering and the Annual West China Photonics Conference Pub Date : 2021-01-15 DOI:10.1117/12.2586060

Zhang Jinkuan, Teng Lin

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引用次数: 0

摘要

采用激光散射仪对激光陀螺反射镜进行检测。结果表明，当反射镜表面存在不同程度的散射亮条纹时，反射镜的激光散射较大。本文基于抛光的亚表面损伤模型，对抛光、清洗、涂层的整个过程进行了研究，揭示了激光散射亮条纹机的深层机理。通过改进工艺，制备了散射斑小、无散射亮条纹的反射镜。

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Generation mechanism and suppression technique of laser scatter bright stripe on mirror surface

The laser gyro mirrors were detected by laser scatterometer. It showed that the laser scattering of the mirror was large when there were different degrees of scatter bright stripes on the surface of the mirror. In this paper, based on the subsurface damage model of polishing, the whole process from polishing, cleaning and coating was studied, and the deep mechanism of the laser scatter bright striper was revealed. By improving the process technology, mirrors with small scatter spot and no scatter bright stripe were prepared.

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International Conference on Photonics and Optical Engineering and the Annual West China Photonics Conference

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