{"title":"不同温度退火氧化锡薄膜的气敏研究","authors":"K. S. Thakare, S. J. Patil, R. R. Ahire","doi":"10.21013/JTE.V9.N2.P1","DOIUrl":null,"url":null,"abstract":"Thin films of Tin oxide (SnO 2 ) were prepared by physical vapour deposition method. The as-prepared films were further annealed at 300°C, 400°C and 500°C to study the effect of annealing on the physical as well as gas sensing properties of the thin films. Gas sensing performance of annealed SnO 2 thin films was studied for different gases having different concentrations at working temperature of 250°C. Significantly, gas response changes for SnO 2 samples annealed at different temperatures, which is discussed herein.","PeriodicalId":269688,"journal":{"name":"IRA-International Journal of Technology & Engineering","volume":"40 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2017-12-08","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Gas Sensing Studies of Tin Oxide Thin Films Annealed at Different Temperatures\",\"authors\":\"K. S. Thakare, S. J. Patil, R. R. Ahire\",\"doi\":\"10.21013/JTE.V9.N2.P1\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"Thin films of Tin oxide (SnO 2 ) were prepared by physical vapour deposition method. The as-prepared films were further annealed at 300°C, 400°C and 500°C to study the effect of annealing on the physical as well as gas sensing properties of the thin films. Gas sensing performance of annealed SnO 2 thin films was studied for different gases having different concentrations at working temperature of 250°C. Significantly, gas response changes for SnO 2 samples annealed at different temperatures, which is discussed herein.\",\"PeriodicalId\":269688,\"journal\":{\"name\":\"IRA-International Journal of Technology & Engineering\",\"volume\":\"40 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2017-12-08\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"IRA-International Journal of Technology & Engineering\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.21013/JTE.V9.N2.P1\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"IRA-International Journal of Technology & Engineering","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.21013/JTE.V9.N2.P1","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
Gas Sensing Studies of Tin Oxide Thin Films Annealed at Different Temperatures
Thin films of Tin oxide (SnO 2 ) were prepared by physical vapour deposition method. The as-prepared films were further annealed at 300°C, 400°C and 500°C to study the effect of annealing on the physical as well as gas sensing properties of the thin films. Gas sensing performance of annealed SnO 2 thin films was studied for different gases having different concentrations at working temperature of 250°C. Significantly, gas response changes for SnO 2 samples annealed at different temperatures, which is discussed herein.
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