使用内部浮动电极的SAW单相单向换能器的场分析

M. Takeuchi, K. Yamanouchi
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引用次数: 18

摘要

利用数字间电极内开路和短路金属条浮动电极的内部反射,对单相单向换能器的性能进行了耦合模式分析。所有四个独立的参数(自耦合系数和互耦合系数,转导系数和静态电容)控制与电转导项的耦合模式方程是通过电场的扩展勒让德多项式展开式和微扰分析解析导出的。从耦合模方程的简单闭式解出发,计算了辐射导纳和插入损耗的频率响应以及表面声波场的增长分布。阐明了不对称电极结构引起的反射中心和转导中心的移位效应。给出了在128°YX LiNbO/ sub3 /衬底上制作的测试器件的实验结果,并与理论进行了比较。理论结果与实验结果吻合较好。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Field analysis o SAW single-phase unidirectional transducers using internal floating electrodes
A coupled-mode analysis is presented of the performance of a single-phase unidirectional transducer utilizing the internal reflections of floating electrodes of electrically open circuited and shorted metal strips within an interdigital electrode. All four independent parameters (self- and mutual-coupling coefficients, transduction coefficient, and static capacitance) governing the coupled-mode equation with an electrical transduction term are analytically derived using extended Legendre polynomial expansions of electrical fields and a perturbation analysis. The frequency response of the radiation admittance and the insertion loss, and the growing surface acoustic wave (SAW) field distributions are calculated from simple closed-form solutions of the coupled-mode equation. The shift effect of reflection and transduction centers due to the asymmetric electrode structure is clarified. Experimental results are given for test devices fabricated on a 128 degrees YX LiNbO/sub 3/ substrate, and compared with the theory. The theoretical results are in good agreement with experiments.<>
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