微小电容检测技术的研究

2022 International Conference on Automation, Robotics and Computer Engineering (ICARCE) Pub Date : 2022-12-16 DOI:10.1109/ICARCE55724.2022.10046482

Jing Li, Xuefeng Liu, Huadong Lian

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引用次数: 0

摘要

极小电容的检测技术主要分为基于分立元件的模拟电路检测方式和基于专用集成芯片的电容检测电路。模拟电路具有抗干扰能力差、设计复杂等局限性。随着数字处理电路的成熟和MEMS技术的发展，基于某型高精度激光指向控制器电容传感器的计算要求，研究了极小电容的检测技术。首先，从三个方面对核心器件进行了选择和分析。然后，设计了电路硬件和软件。最后进行了实验验证。测量结果表明，在1kHz采样率下，该系统可以满足测量范围为1pF ~ 30pF、分辨率为1.4fF的检测要求。

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Research on the Detecting Technology of Tiny Capacitance

The detection technology of extremely small capacitance is mainly divided into analog circuit detection mode based on discrete components and capacitance detection circuit based on special integrated chips. The analog circuit has the limitations of poor anti interference ability and complex design. With the maturity of digital processing circuit and the development of MEMS technology, based on the calculation requirements of the capacitance sensor of a certain type of high-precision laser pointing controller, the detection technology of extremely small capacitance is studied. First, three aspects of core device are chosen and analyzed. Then, circuit hardware and software are designed. Finally, experiments are tested and verified. The measured results show that the system can meet the detection requirements of measuring range from 1pF to 30pF and resolution of 1.4fF at 1kHz sampling rate.

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来源期刊

2022 International Conference on Automation, Robotics and Computer Engineering (ICARCE)

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