电弧真空放电等离子体凝聚涂层生长速率的测定方法

A. V. Oleinik, E. Vardanyan, K. Ramazanov
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引用次数: 0

摘要

开发了计算离子等离子体源周围粒子密度分布系数随测量次数的标准差和置信区间的程序。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Method for determining of growth rate of coatings condensed from arc-vacuum discharge plasma
A program for calculating of the standard deviation and the confidence interval for the particle density distribution coefficients around an ion-plasma source depending on the number of measurements is developed.
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