采用at切割石英晶体谐振器的大量程负载传感器小型化

K. Narumi, T. Fukuda, F. Arai
{"title":"采用at切割石英晶体谐振器的大量程负载传感器小型化","authors":"K. Narumi, T. Fukuda, F. Arai","doi":"10.1109/MHS.2009.5351808","DOIUrl":null,"url":null,"abstract":"A compact load sensor we developed uses an AT-cut quartz crystal resonator whose resonance frequency changes under external load, and features high sensitivity, high-speed response, and a wide measurement range. Also it has the superior feature in the temperature and frequency stability. In the past, the quartz crystal resonator had been hardly applied to the load measurement because of low degree of mechanical characteristic, that is, it is weak to stress concentration by bending. We have developed and characterized a sensor mechanism that safely maintains the quartz crystal resonator. The sensor had enormously wide range of 104 N. The objective of this study is to miniaturize the sensor and to improve the resolution of load measurement. We designed a novel retention mechanism of the quartz crystal resonator which had frictionless structure. We calculated and analyzed about the new retention mechanism, and determined parameters. The size of the retention mechanism was 7.0 mm wide, 4.0 mm deep and 1.9 mm high, which was 40.3% of the conventional one (volume ratio).","PeriodicalId":344667,"journal":{"name":"2009 International Symposium on Micro-NanoMechatronics and Human Science","volume":"40 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2009-12-11","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"2","resultStr":"{\"title\":\"Miniaturization of a wide range load sensor using AT-cut quartz crystal resonator\",\"authors\":\"K. Narumi, T. Fukuda, F. Arai\",\"doi\":\"10.1109/MHS.2009.5351808\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"A compact load sensor we developed uses an AT-cut quartz crystal resonator whose resonance frequency changes under external load, and features high sensitivity, high-speed response, and a wide measurement range. Also it has the superior feature in the temperature and frequency stability. In the past, the quartz crystal resonator had been hardly applied to the load measurement because of low degree of mechanical characteristic, that is, it is weak to stress concentration by bending. We have developed and characterized a sensor mechanism that safely maintains the quartz crystal resonator. The sensor had enormously wide range of 104 N. The objective of this study is to miniaturize the sensor and to improve the resolution of load measurement. We designed a novel retention mechanism of the quartz crystal resonator which had frictionless structure. We calculated and analyzed about the new retention mechanism, and determined parameters. The size of the retention mechanism was 7.0 mm wide, 4.0 mm deep and 1.9 mm high, which was 40.3% of the conventional one (volume ratio).\",\"PeriodicalId\":344667,\"journal\":{\"name\":\"2009 International Symposium on Micro-NanoMechatronics and Human Science\",\"volume\":\"40 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2009-12-11\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"2\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2009 International Symposium on Micro-NanoMechatronics and Human Science\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/MHS.2009.5351808\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2009 International Symposium on Micro-NanoMechatronics and Human Science","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/MHS.2009.5351808","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 2

摘要

我们开发的紧凑型负载传感器采用at切割石英晶体谐振器,其谐振频率在外部负载下发生变化,具有灵敏度高,响应速度快,测量范围宽的特点。在温度稳定性和频率稳定性方面也具有优越的特点。过去,由于石英晶体谐振器的机械特性程度较低,即对弯曲引起的应力集中反应较弱,因此很少应用于负载测量。我们已经开发并表征了一种传感器机制,可以安全地维护石英晶体谐振器。该传感器具有104 n的极宽量程,本研究的目的是使传感器小型化,并提高负载测量的分辨率。设计了一种新型无摩擦石英晶体谐振腔的保持机构。对新的留质机理进行了计算分析,确定了参数。截留机构的尺寸为宽7.0 mm、深4.0 mm、高1.9 mm,为常规截留机构的40.3%(体积比)。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Miniaturization of a wide range load sensor using AT-cut quartz crystal resonator
A compact load sensor we developed uses an AT-cut quartz crystal resonator whose resonance frequency changes under external load, and features high sensitivity, high-speed response, and a wide measurement range. Also it has the superior feature in the temperature and frequency stability. In the past, the quartz crystal resonator had been hardly applied to the load measurement because of low degree of mechanical characteristic, that is, it is weak to stress concentration by bending. We have developed and characterized a sensor mechanism that safely maintains the quartz crystal resonator. The sensor had enormously wide range of 104 N. The objective of this study is to miniaturize the sensor and to improve the resolution of load measurement. We designed a novel retention mechanism of the quartz crystal resonator which had frictionless structure. We calculated and analyzed about the new retention mechanism, and determined parameters. The size of the retention mechanism was 7.0 mm wide, 4.0 mm deep and 1.9 mm high, which was 40.3% of the conventional one (volume ratio).
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