Comparative analysis of a 2-dof micro-stage with two different types of hinges based on level amplified principle

The micro-stage is paid more and more attentions in the field of the micro/nano manipulation and assembly, which can be found applications in the precision manipulating, precision positioning, and biomedical areas. Flexure hinges have more advantages than conventional hinges with advantages of no friction, no backlash, high precision and high stiffness. In this paper, design and analysis of the two degrees of freedom flexure-hinges based micro-stage are performed. The lever amplified principle is used, which has a lot of superiorities for applying to the micro-stage through amplifying the displacement of the piezoelectric actuator (PZT) to obtain a lager output displacement at the stage's end-effector. The ANSYS software version 10.0 is exploited to analyze the displacement and natural frequency.