基于微镜阵列的快速灵活测速光学空间滤波技术

M. Degner, H. Krüger, H. Ewald
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引用次数: 3

摘要

空间滤波技术是测量传感器与被观测表面之间相对速度的一种光学方法。这种技术已经有几十年的历史了,它的优点是光学设置简单,对数据采集和分析的要求低。因此,它是一种有价值的在线非接触式测速方法。经典的空间滤波设置是基于一个静态光栅在光学探测路径至少有一个或两个光电探测器。较新的发展是使用线阵列或二维探测器(例如CCD或CMOS)。在这里,光栅结构是通过在信号预处理中加权像素来实现的。该阵列传感器的探测速度比传统的光电探测器慢得多,但其适应应用的灵活性要高得多。这两种特性对于空间滤波传感器都很重要,可以在广泛的应用中使用。本文提出了一种基于微镜阵列的新型光学空间滤波器设计,结合了这两种系统的优点。它利用快速光电探测器与一个非常精确、灵活和高分辨率的微分光栅相结合,由微镜阵列实现。本文简要介绍了空间测量技术,解释了基于微镜阵列的传感器方法,并展示了概念验证。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Micromirror array based optical spatial filter technique for fast and flexible velocimetry
Spatial filtering technique is an optical method for measurement of the relative velocity between the sensor and the observed surface(s). This technique is well known for tens of years, its benefits are a potentially simple optical setup and low requirements to the data acquisition and analysis. Therefore it is a valuable method for online contactless velocimetry. The classical spatial filtering setup is based on a static grating in the optical detection path with at least one or two photodetectors. Newer developments are using line array or two-dimensional detectors (e.g. CCD or CMOS). Here the grating structure is realized by weighting the pixels in a signal pre-processing. The flexibility of adapting the grating to the application is much higher but the detector speed of the array sensors is much lower than that of the photodetectors in the classical setup. Both properties are important for a spatial filter sensor that can be used in a wide range of application. The novel micromirror array based optical spatial filter design that is presented in this paper combines the advantages of both state of the art systems. It utilizes fast photodetectors in combination with a very precise, flexible and high resolved differential grating that is realized by the micromirror array. The present paper gives a short overview on the spatial measurement technique, explains the micromirror array based sensor approach and shows the proof of concept.
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