氮螯合z毛细管放电的时间分辨EUV光谱

M. Nevrkla, A. Jancarek, F. Nawaz, T. Parkman, M. Vrbova
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引用次数: 3

摘要

记录并分析了氮放电等离子体辐射的时间积分光谱和20 ns分辨率的时间分辨光谱。等离子体由70 kA, 29 ns的上升时间电流脉冲流过内径5 mm,长224 mm充满氮气的毛细管,初始压力为0.1 ÷ 1 kPa。在8.3 ~ 14 nm波长范围内采集光谱。该光谱区包含氮巴尔默系列谱线,包括潜在的激光NVII 2 - 3跃迁。利用NIST数据库和FLY动力学代码对谱线进行识别。结合光谱测量了毛细管电流。由于驱动器的低电感设计,从测量电流可以直接观察到夹脚。在门控光谱中观察到13.38 nm的NVII 2 - 3谱线,在电流<60 kA时也观察到时间积分谱线。对于更高的充气压力,也观察到其他巴尔默系列管线。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Time-resolved EUV spectra from nitrogen Z-pinching capillary discharge
Time-integrated spectra and time-resolved spectra (20 ns resolution) of nitrogen discharge plasma radiation were recorded and analyzed. Plasma was created by a 70 kA, 29 ns rise-time current pulse flowing through a 5 mm inner diameter, 224 mm long capillary filled with nitrogen to initial pressure ∼0.1 ÷ 1 kPa. Spectra were captured in the wavelength range 8.3 ÷ 14 nm. This spectral region contains nitrogen Balmer series lines including potentially lasing NVII 2 – 3 transition1. Spectral lines were identified using the NIST database and the FLY kinetic code. Together with spectra the capillary current was measured. Due to the low inductance design of the driver, the pinch is observable directly from the measured current. 13.38 nm NVII 2 – 3 line was observed in gated, and also in time-integrated spectra for currents <60 kA. For higher gas-filling pressure also other Balmer series lines were observed.
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