具有黏性的层状压电结构中瑞利波的传播

Jinxiang Shen, Ji Wang, Jianke Du, Dejin Huang
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引用次数: 0

摘要

压电薄膜的层状结构是近年来出现的膜体声谐振器(FBAR)和表面安装式谐振器(SMR)的核心。随着薄膜声波谐振器的产品在电信应用中被接受,其显著的优点和可接受的性能已经受到结构、材料和其他修改的可能改进,以满足优选制造工艺对小型化设备的要求。这些改进,由于产品的制造工艺和设计技术已经很复杂,必须结合分析模型和实际制造。在实际应用中,作为电路中的频率控制元件,我们需要从设计和实际产品中获得电气参数,但在进行实际测量之前,我们很少能够获得诸如电阻、电容、质量因子等的估计。在已知声波谐振器的作用机理和能量损失机理的基础上,推导出了具有材料粘度的谐振器中声波的传播规律,并给出了可用于电学参数估计的解。对于传统的石英晶体体声波谐振器和薄膜体声波谐振器,已经建立了这样的程序,现在的关键问题是粘度的确定,而粘度通常不是我们从材料测试中得到的理想值。不难想象,主要的能量损失或粘度来自于层的键合过程,它带来了污染和表面改性,这对典型谐振器的整体性能起着更重要的作用。根据这些原理和经验,我们从具有粘性压电层的表面安装谐振器模型开始。按照熟悉的考虑黏度的程序,得到了一个复杂的波传播方程组,得到了不再是实值的振动频率、变形和电场。我们的重点是研究粘度对振动频率和波传播的影响。有了已知的主要性质,如质量因子,我们可以获得压电层中主要粘度的相对较好的估计,这反过来对于计算其他电气参数至关重要,正如我们对FBAR类型所做的那样。当然,通常的离散电极表面波谐振器的结构将导致更复杂的公式,这将是我们未来研究的重点
本文章由计算机程序翻译,如有差异,请以英文原文为准。
The propagation of Rayleigh waves in layered piezoelectric structures with viscosity
Layered structures of piezoelectric films are the core of recently emerged film acoustic resonators of both film bulk acoustic resonators (FBAR) and surface mounted resonators (SMR). As products of film acoustic wave resonators are being accepted in telecommunication applications, notable advantages and acceptable performance have been subjected to possible improvements with structures, materials, and other modifications to meet demands for miniaturized devices from the preferred manufacturing process. These improvements, as the products are already sophisticated with the manufacturing process and design techniques, have to be made with the combination of analytical model and actual fabrication. For practical applications as a frequency control element in circuits, we need to have the electrical parameters from design and actual products, but we can rarely obtain the estimation before we make actual measurement like the resistance, capacitance, and the quality factor. With the known functioning mechanism and energy loss mechanism of acoustic wave resonators, we have been able to formulate the wave propagation in resonators with viscosity of materials for solutions which can be used for the estimations of electrical parameters. Such a procedure has been established for bulk acoustic wave resonators of both traditional quartz crystal and film bulk acoustic wave types, and the key issue is now the determination of the viscosity, which usually is not the ideal value we can obtain from material testing. Not hard to imagine, the dominant energy loss, or the viscosity, is from the bonding process of layers which brought contamination and surface modification which play more important roles in the overall performance of a typical resonator. With these principles and experiences, we start with a surface mounting resonator model with viscous piezoelectric layers. Following the familiar procedure for the viscosity consideration, a complex system of wave propagation equations are obtained, and the vibration frequency, which is no longer real-valued, the deformation, and electrical fields are obtained. Our focus is on the effect of the viscosity on the vibration frequency and wave propagation. With the known major properties such as the quality factor, we can obtain a relatively good estimation of the dominant viscosity in the piezoelectric layer, which in turn will be essential for the calculation of other electrical parameters as we have done for FBAR type. Of course, the usual structure of surface wave resonators with discrete electrodes (IDTs) will result in more complicated formulations which will be our focus the future studies
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