全固态深紫外激光器的研究进展

Conference Proceedings LEOS'96 9th Annual Meeting IEEE Lasers and Electro-Optics Society Pub Date : 1996-11-18 DOI:10.1109/LEOS.1996.571923

M. Oka, H. Masuda, H. Kikuchi, S. Kubota

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引用次数: 0

摘要

高功率深紫外辐射在光刻等领域引起了广泛的关注。我们报道了在提高czochralski -grow /spl β /-BaB/sub 2/O/sub 4/ (BBO)的质量方面取得的进展，这是在深紫外波段产生高平均输出功率所必需的。为了评估我们的CZ生长BBO，使用闪光灯泵浦调q Nd:YAG激光器(Quantel YG-682S)。

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Progress in all-solid-state deep-ultraviolet lasers

High power deep ultraviolet (UV) radiation has attracted much attention in areas such as photo-lithography. We report progress in improving the quality of Czochralski-grown /spl beta/-BaB/sub 2/O/sub 4/ (BBO) which is essential for generating high average output power in the deep ultraviolet regime. In order to evaluate our CZ grown BBO, a flash-lamp pumped Q-switched Nd:YAG laser (Quantel YG-682S) was employed.

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Conference Proceedings LEOS'96 9th Annual Meeting IEEE Lasers and Electro-Optics Society

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