短脉冲激光吸收介质烧蚀特性的参数化研究

S. George, K. Mitra
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引用次数: 0

摘要

本文研究了准分子激光连续两个超短脉冲对吸收介质的烧蚀效应。数值模型基于双光子吸收,然后是热降解和扩散。与以往的大多数研究不同,本公式考虑了激光在介质中传播的瞬态性质。材料的加热取决于发色团对光的吸收,而烧蚀则是通过材料表面的升华而发生的。该数学公式考虑了发色团电子结构三能级系统框架内的饱和效应。这涉及到用Fromm格式求解一组耦合速率方程、热扩散方程和瞬态辐射输运方程。得到了不同激光参数和材料性能对温度分布和烧蚀深度的影响。为了简洁起见,本文仅对两个连续脉冲之间的延迟时间、激光脉宽、激光通量、活化能和弛豫时间进行参数化研究。将瞬态辐射传递方程的计算结果与稳态方程的计算结果进行了比较,发现在温度分布和烧蚀深度上存在显著差异。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Parametric Study of the Ablation Characteristics of Absorbing Dielectrics by Short Pulse Laser
This paper investigates the effect of ablation of absorbing dielectrics by two successive ultra short pulses from an excimer laser source. The numerical model is based on two photon absorption followed by thermal degradation and diffusion. Unlike most previous studies the present formulation considers the transient nature of laser propagation within the medium. Heating of the material is dependent on light absorption by chromophores while ablation occurs through sublimation of the material from the surface. The mathematical formulation takes into consideration the saturation effects within the framework of a three level system of the electronic structure of chromophores. This involves solving a set of coupled rate equations, heat diffusion equation, and the transient radiative transport equation, using Fromm’s scheme. Results for the temperature distribution and ablation depth are obtained for different laser parameters and material properties. Parametric study of the delay time between two successive pulses, laser pulse width, laser fluence, activation energy, and the relaxation time is only performed in this paper for the purpose of brevity. The results obtained by the consideration of the transient radiative transfer equation are compared with the steady state formulation and significant differences are observed in the temperature profiles and the ablation depth.
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