用LiNbO3和LiTaO3 LFE谐振器模拟和测量低介电常数介质

J. Fochtmann, Christian Peters, R. Diaz, R. Lucklum, J. McGann, J. Vetelino, A. Arnau
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引用次数: 1

摘要

本文的工作重点是用侧向场激发(LFE)谐振器测量粘性液体。由于较大的机电耦合系数k被认为有利于降低对邻近介质粘度的敏感性,因此应用并比较了具有较大机电耦合系数的不同材料(LiNbO3, LiTaO3和石英)。此外,还研究了一种不同于标准共面LFE模式的电极结构。对石英晶体的力学和电学性质随周围介质介电常数的变化进行了模拟。开发了相应的阻抗分析电子电路。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Simulation and measurement of low permittivity media with LiNbO3 and LiTaO3 LFE resonators
The focus of this work is the measurement of viscous liquids with lateral field excited (LFE) resonators. Since a large electromechanical coupling factor k is supposed to be favourable for decreased sensitivity to the adjacent media's viscosity, different materials (LiNbO3, LiTaO3 and quartz) having larger electromechanical coupling factors have been applied and compared. Additionally, an electrode configuration different to the standard coplanar LFE pattern has been investigated. Simulations have been performed concerning changes in mechanical and electrical properties of quartz crystals with the variation of the permittivity of the surrounding media. Corresponding electronic circuits for impedance analysis has been developed.
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