A vibration-controlled resonant accelerometer design and its application to the single structured gyroscope/accelerometer system

In this paper, we present a novel approach for self-sustained resonant accelerometer design, which takes advantages of an automatic gain control to implement a uniform oscillation dynamics. For the system modeling and loop transformation, an envelope based state space approach is taken. The paper also presents the application of the designed accelerometer for an integrated gyroscope and accelerometer system with an orthogonal input axis to each other. The integrated system uses of a single micromachined mechanical structure as moving mass and the associated vibration control loops for each sensing axis, respectively.