微型器件集成与可拉伸弹簧嵌入在长pdms光纤柔性电子

W. Sung, Chao-Lin Cheng, W. Fang
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引用次数: 2

摘要

本研究提出了一种采用可拉伸电镀铜弹簧的PDMS(聚二甲基硅氧烷)纤维多器件集成方案。每个设备都位于节点上并嵌入到pdms光纤中。因此,设备通过pdms纤维机械连接,通过内部可拉伸弹簧电气连接。从而实现大面积、灵活的应用。这种方法的优点:(1)可拉伸弹簧的长度放大;(2) PDMS内嵌较厚的可拉伸弹簧具有良好的机械和电气特性;(3)节点作为设备实现和集成的枢纽;(4)部分拉伸弹簧可以减小外载荷对弹簧阻力的影响。采用在4英寸晶圆上制造的2.4厘米节点弹簧元件,实现了带有传感器和LED的6.2厘米pdms光纤。使用不同的弹簧设计可以实现长度大于30cm的pdms纤维。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Micro devices integration with stretchable spring embedded in long PDMS-fiber for flexible electronics
This study presents a PDMS (Polydimethylsiloxane) fiber integrated with multi devices scheme using stretchable electroplating copper spring. Each device was located on the node and embedded in PDMS-fiber. Thus, devices are mechanically connected by PDMS-fiber and electrically connected by inner stretchable spring. Thus, large-area and flexible applications can be achieved. Advantages of this approach: (1) length magnification by stretchable spring; (2) thicker stretchable spring embedded in PDMS provides well mechanical and electrical characteristics; (3) node acts as a hub for devices implementation and integration; (4) partially stretched spring could reduce the resistance variation by external loads. A 6.2cm PDMS-fiber with sensors and LED is implemented using a 2.4cm node-spring components fabricated on 4-inch wafer. PDMS-fiber longer than 30cm can be achieved using different spring design.
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