不同辅助参数生长SiO/ sub2 /薄膜的激光损伤阈值:光声海市蜃楼技术的比较研究

M. Alvisi, G. De Nunzio, M. Perrone, A. Rizzo, S. Scaglione, L. Vasanelli
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引用次数: 0

摘要

激光光束的质量很大程度上取决于腔镜的光学特性;因此,开发高质量的UV/VUV涂层光学元件已成为研究人员和工业界的迫切要求。沉积技术的选择对薄膜的特性有相当大的影响:离子辅助技术的使用是提高薄膜致密性和附着力的一种手段,同时限制了沉积过程中衬底的温度。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Laser-Induced Damage Thresholds of SiO/sub 2/ Films Grown with Different Assistance Parameters: A Comparative Study Performed by the Photoacoustic Mirage Technique
The quality of laser beams strongly depends on the optical characteristics of the cavity mirrors; thus the development of good quality UV/VUV coated optical components is much requested by researchers and industry. The choice of the deposition technique has a considerable influence on the film features: the use of ion assisted techniques is a means of improving the compactness and adhesion of films, while limiting the temperature of the substrate during the deposition.
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