自感应结硅光电二极管的表面钝化

P. Neuvonen, E. Monakhov, Chi Kwong Tang, J. Gran, T. Kubarsepp
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引用次数: 0

摘要

研究了化学钝化和电钝化对自致结光电二极管的影响。通过实验方法和模拟,表明在这类光电二极管中化学钝化优于电钝化。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Surface passivation in self-induced junction Si photodiodes
The effects of chemical and electrical passivation in self-induced junction photodiodes have been studied. By employing experimental methods and simulations, it is shown that chemical passivation dominates over electrical passivation in this type of photodiodes.
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