管道电极等离子体化学汽化加工在光学制造中的研究进展

International Journal of Electrical Machining Pub Date : 1900-01-01 DOI:10.2526/IJEM.17.1

H. Takino

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引用次数: 1

摘要

等离子体化学汽化加工(CVM)是一种高精度的化学成形方法，它利用在大气环境中电极附近产生的射频等离子体。基于等离子体CVM原理，提出了一种用于光学加工的管状电极等离子体CVM计算机数控装置。本文综述了等离子体CVM器件及其去除特性，以及利用该器件制备玻璃光学器件的结果

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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Plasma Chemical Vaporization Machining with a Pipe Electrode for Optical Fabrication : a Review

Plasma chemical vaporization machining (CVM) has been proposed as a high-precision chemical shaping method, which uses rf plasma generated in the proximity of an electrode in an atmospheric environment. Based on the principle of plasma CVM, a computer numerically controlled plasma CVM device with a pipe electrode was proposed for optical fabrication. This paper reviews the plasma CVM device, its removal characteristics, and the fabrication results of glass optics by use of the device

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International Journal of Electrical Machining

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