14.45 GHz ECR离子源波导破断设计的等效电路方法研究

Anuraag Misra, Indira Chatterjee, P. Y. Nabhiraj
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引用次数: 0

摘要

本文提出了一种基于传输线理论的等效电路方法来设计14.45 GHz ECR离子源的波导破断。首先用等效电路法得到了三种波导破断设计的参数。然后使用商用有限元软件ANSYS HFSS对这些设计进行了仿真。在正向功率为200W的情况下,测量了所有设计的反射功率。最后,对等效电路方法、HFSS仿真和测量结果进行了比较。本文首次证明了等效电路方法在波导折断设计中是非常有效的,与测量结果相比,可以估计出反射功率,误差小于4%。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Studies on equivalent circuit approach to design waveguide break for 14.45 GHz ECR ion source
In this article an equivalent circuit approach based on transmission line theory is proposed to design the waveguide break for 14.45 GHz ECR ion source. The parameters of three designs of waveguide break are first obtained using equivalent circuit approach. These designs are then simulated using a commercial FEM software ANSYS HFSS. Furthermore, all the designs are fabricated and reflected power for all the designs are measured at a forward power of 200W. Finally, a comparison is drawn among the results of equivalent circuit approach, HFSS simulation and measurements. It is demonstrated first time in this work that equivalent circuit approach is quite effective in the design of waveguide break and can estimate reflected power with an error less than 4% as compared to the measurement results.
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