{"title":"等离子离子辅助沉积多层涂层的粗糙度演化和光散射模拟","authors":"D. Tonova, S. Bruynooghe, D. Isfort","doi":"10.1364/OIC.2019.TE.3","DOIUrl":null,"url":null,"abstract":"The roughness evolution of Nb2O5 and SiO2 thin films and multilayers, deposited with low energy Plasma Ion-Assistance, is investigated and modelled. The models are used to predict the light scattering of a longwave pass filter.","PeriodicalId":119323,"journal":{"name":"Optical Interference Coatings Conference (OIC) 2019","volume":"29 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2019-06-02","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Roughness Evolution and Light Scattering Simulation in Multilayer Coatings Deposited with Plasma Ion-Assistance\",\"authors\":\"D. Tonova, S. Bruynooghe, D. Isfort\",\"doi\":\"10.1364/OIC.2019.TE.3\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"The roughness evolution of Nb2O5 and SiO2 thin films and multilayers, deposited with low energy Plasma Ion-Assistance, is investigated and modelled. The models are used to predict the light scattering of a longwave pass filter.\",\"PeriodicalId\":119323,\"journal\":{\"name\":\"Optical Interference Coatings Conference (OIC) 2019\",\"volume\":\"29 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2019-06-02\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Optical Interference Coatings Conference (OIC) 2019\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1364/OIC.2019.TE.3\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Optical Interference Coatings Conference (OIC) 2019","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1364/OIC.2019.TE.3","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
Roughness Evolution and Light Scattering Simulation in Multilayer Coatings Deposited with Plasma Ion-Assistance
The roughness evolution of Nb2O5 and SiO2 thin films and multilayers, deposited with low energy Plasma Ion-Assistance, is investigated and modelled. The models are used to predict the light scattering of a longwave pass filter.
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