微电子设备大气中有害杂质扩散分析

2021 IEEE Conference of Russian Young Researchers in Electrical and Electronic Engineering (ElConRus) Pub Date : 2021-01-26 DOI:10.1109/ElConRus51938.2021.9396234

Mikhail A. Gundartcev, Andrei S. Riabyshenkov, Andrei A. Gundartcev, V. Sharaeva, V. Karakeyan

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引用次数: 0

摘要

大气空气是环境中最重要的组成部分，其质量取决于该地区的天气和气候条件以及工业设施中有害杂质的具体情况。本文介绍了用数学和计算机模拟方法对某微电子设备开发区域大气中有害杂质的扩散场进行模拟的结果。研究区有害杂质扩散的模拟表明，扩散场超出了工业设施的防护和卫生区域的边界，并到达住宅区。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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Analysis of the Spread of Harmful Impurities in the Atmosphere from Microelectronic Facilities

Atmospheric air is the most important component of the environment, which the quality depends on the weather and climatic conditions of the region and the specifics of harmful impurities of industrial facilities. The article presents the results of mathematical and computer modeling when constructing the fields of dispersion of harmful impurities in the atmosphere in the area of exploitation of a microelectronics facilities. The modeling of the spread of harmful impurities in the study area showed that the dispersion fields go beyond the boundaries of the protective and sanitary zone of an industrial facility and reach residential sectors.

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2021 IEEE Conference of Russian Young Researchers in Electrical and Electronic Engineering (ElConRus)

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