多层石墨烯薄膜的合成与表征及其在电子领域的潜在应用

Arturo Mora Lazarini, Y. Matsumoto, V. Sanchez-Resendiz, M. Ortega-López, J. Salazar, Ramon Gutierrez Arias
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引用次数: 2

摘要

本工作报道了利用自制APCVD装置生长的几层石墨烯(FLG)薄膜的合成和表征。FLG薄膜生长在蒸发的多晶镍薄膜上,在氩气和甲烷的混合物中以相对大的流量生长,沉积时间很短。在800 ~ 1000℃范围内改变氩气/甲烷比和温度等实验参数,得到最佳的FLG沉积参数。我们能够获得相对较大的面积(1 × 1英寸)FLG薄膜,包括3-5个石墨烯片。此外,还报道了制作合适的石墨烯/SiO2/Si电子器件的早期尝试。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Synthesis and characterization of few layers graphene films for potential applications in electronics
This work reports the synthesis and characterization of few layers graphene (FLG) film, which was grown by using a home-made APCVD set-up. The FLG films were grown on evaporated polycrystalline nickel films under a mixture of argon and methane with a relatively large-flow and for very short deposition times. The experimental parameters such as the argon/methane ratio and temperature were varied from 800 to 1000 °C, to obtain the optimal FLG deposition parameters. We were able to obtain relatively large area (1 × 1 inch) FLG films comprising 3-5 graphene sheets. Additionally, early attempts to make suitable graphene/SiO2/Si electronic devices are also reported.
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