{"title":"金铝梁MEMS并联电容开关的射频分析","authors":"S. Agarwal, Mithlesh Kumar, K. Guha, S. Baishya","doi":"10.1109/ICACEA.2015.7164713","DOIUrl":null,"url":null,"abstract":"In a practical MEMS switch, there is a gap between the beam and the signals lines. Based on this, a study on frequency response starting from dc to radio frequency for Gold and Aluminium is carried out. Study reveals that the pull-in voltage and capacitance ratio for Gold are 13.8 V and 88.3, respectively; while for Aluminium these values are 11.4 V and 82.4, respectively. Also a detailed study of variation of insertion loss with frequency is also carried out. The insertion and isolation losses with gold as beam layer are -1.42 and 40.4 dB, respectively, at radio frequency, while the same losses for Aluminium as beam layer are -1.19 and 36.1 dB, respectively at the same frequency.","PeriodicalId":202893,"journal":{"name":"2015 International Conference on Advances in Computer Engineering and Applications","volume":"19 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2015-03-19","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"5","resultStr":"{\"title\":\"RF analysis of MEMS shunt capacitive switch with gold and aluminium beam\",\"authors\":\"S. Agarwal, Mithlesh Kumar, K. Guha, S. Baishya\",\"doi\":\"10.1109/ICACEA.2015.7164713\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"In a practical MEMS switch, there is a gap between the beam and the signals lines. Based on this, a study on frequency response starting from dc to radio frequency for Gold and Aluminium is carried out. Study reveals that the pull-in voltage and capacitance ratio for Gold are 13.8 V and 88.3, respectively; while for Aluminium these values are 11.4 V and 82.4, respectively. Also a detailed study of variation of insertion loss with frequency is also carried out. The insertion and isolation losses with gold as beam layer are -1.42 and 40.4 dB, respectively, at radio frequency, while the same losses for Aluminium as beam layer are -1.19 and 36.1 dB, respectively at the same frequency.\",\"PeriodicalId\":202893,\"journal\":{\"name\":\"2015 International Conference on Advances in Computer Engineering and Applications\",\"volume\":\"19 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2015-03-19\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"5\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2015 International Conference on Advances in Computer Engineering and Applications\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/ICACEA.2015.7164713\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2015 International Conference on Advances in Computer Engineering and Applications","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/ICACEA.2015.7164713","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
RF analysis of MEMS shunt capacitive switch with gold and aluminium beam
In a practical MEMS switch, there is a gap between the beam and the signals lines. Based on this, a study on frequency response starting from dc to radio frequency for Gold and Aluminium is carried out. Study reveals that the pull-in voltage and capacitance ratio for Gold are 13.8 V and 88.3, respectively; while for Aluminium these values are 11.4 V and 82.4, respectively. Also a detailed study of variation of insertion loss with frequency is also carried out. The insertion and isolation losses with gold as beam layer are -1.42 and 40.4 dB, respectively, at radio frequency, while the same losses for Aluminium as beam layer are -1.19 and 36.1 dB, respectively at the same frequency.
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