基于M3D的RF-MEMS直写打印研究进展

2014 IEEE MTT-S International Microwave Symposium (IMS2014) Pub Date : 2014-06-01 DOI:10.1109/MWSYM.2014.6848652

A. M. N. Al-Mobin, R. Shankar, W. Cross, J. Kellar, K. Whites, D. Anagnostou

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引用次数: 10

摘要

我们报告了一种使用内部定制墨水制造欧姆接触RF MEMS开关的增材制造工艺。制造过程包括使用导电银油墨和PMMA[聚(甲基丙烯酸甲酯)]光敏聚合物油墨的多个步骤的增材印刷。油墨符合M3D材料沉积系统的流变学要求。沉积温度为40°C，特征尺寸为10-20μm。该工艺的最高温度取决于油墨的固化，为250℃。在柔性卡普顿(Kapton™)衬底上成功制备了一种功能欧姆接触悬臂式射频MEMS开关，并对其进行了测试。

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Advances in direct-write printing of RF-MEMS using M3D

We report an additive manufacturing process using in-house custom-made inks for the fabrication of ohmic contact RF MEMS switches. The fabrication involves multiple steps of additive printing using a conductive silver ink and a PMMA [poly(methyl methacrylate)] photoresistive polymer ink. The inks comply with the rheology requirements of the M3D material deposition system. Deposition is made at 40°C and feature sizes involve 10-20μm. The maximum temperature of the process depends on ink curing and was 250°C. A functional ohmic contact cantilever RF MEMS switch on flexible Kapton™ substrate was fabricated and tested successfully, and results are presented.

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2014 IEEE MTT-S International Microwave Symposium (IMS2014)

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