{"title":"Au对Al/Ni(V)/Cu薄膜金属化共晶SnPb和SnAgCu钎料界面反应的影响","authors":"Fan Zhang, C. Chum, Ming Li","doi":"10.1109/ECTC.2002.1008178","DOIUrl":null,"url":null,"abstract":"Effect of various amounts of Au on the interfacial reactions of SnPb and SnAgCu solders and Al/Ni(V)/Cu underbump metallurgy were investigated after high temperature storage and multiple reflows. During high temperature storage, the presence of Au varied the formation of intermetallic compounds at solder/UBM interfaces from a binary Cu/sub 6/Sn/sub 5/ phase to a ternary Cu-Sn-Au or quarternary Cu-Sn-Ni-Au phase. The phase transformation was a diffusion controlled process, which was influenced by Au amount, aging temperature and solder composition. The effectiveness of the diffusion barrier layer of UBM was also weakened, since Ni and Sri could diffuse and react through a ternary or quarternary phase. Up to 500 hours at 150/spl deg/C all samples showed a ductile failure inside solder under the ball shear test, which indicated a relatively good bonding between the solder and UBM. From these results it was concluded that detrimental effect of Au on the stability of Ni was not as significant as that of Ni/Au substrate metallization. Ni from substrate finish may also play an important role in the interfacial reaction between the solder and Al/Ni(V)/Cu UBM.","PeriodicalId":285713,"journal":{"name":"52nd Electronic Components and Technology Conference 2002. (Cat. No.02CH37345)","volume":"51 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2002-08-07","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"9","resultStr":"{\"title\":\"Effect of Au on interfacial reactions of eutectic SnPb and SnAgCu solders with Al/Ni(V)/Cu thin film metallization\",\"authors\":\"Fan Zhang, C. Chum, Ming Li\",\"doi\":\"10.1109/ECTC.2002.1008178\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"Effect of various amounts of Au on the interfacial reactions of SnPb and SnAgCu solders and Al/Ni(V)/Cu underbump metallurgy were investigated after high temperature storage and multiple reflows. During high temperature storage, the presence of Au varied the formation of intermetallic compounds at solder/UBM interfaces from a binary Cu/sub 6/Sn/sub 5/ phase to a ternary Cu-Sn-Au or quarternary Cu-Sn-Ni-Au phase. The phase transformation was a diffusion controlled process, which was influenced by Au amount, aging temperature and solder composition. The effectiveness of the diffusion barrier layer of UBM was also weakened, since Ni and Sri could diffuse and react through a ternary or quarternary phase. Up to 500 hours at 150/spl deg/C all samples showed a ductile failure inside solder under the ball shear test, which indicated a relatively good bonding between the solder and UBM. From these results it was concluded that detrimental effect of Au on the stability of Ni was not as significant as that of Ni/Au substrate metallization. Ni from substrate finish may also play an important role in the interfacial reaction between the solder and Al/Ni(V)/Cu UBM.\",\"PeriodicalId\":285713,\"journal\":{\"name\":\"52nd Electronic Components and Technology Conference 2002. (Cat. No.02CH37345)\",\"volume\":\"51 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2002-08-07\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"9\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"52nd Electronic Components and Technology Conference 2002. (Cat. No.02CH37345)\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/ECTC.2002.1008178\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"52nd Electronic Components and Technology Conference 2002. (Cat. No.02CH37345)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/ECTC.2002.1008178","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 9
摘要
在高温贮存和多次回流后,研究了不同Au用量对SnPb和SnAgCu钎料界面反应和Al/Ni(V)/Cu碰撞下冶金的影响。在高温储存过程中,Au的存在改变了钎料/UBM界面金属间化合物的形成,从二元Cu/sub - 6/Sn/sub - 5/相转变为三元Cu-Sn-Au或四元Cu-Sn- ni -Au相。相变是一个扩散控制的过程,受Au用量、时效温度和焊料成分的影响。由于Ni和Sri可以通过三元或四相扩散和反应,UBM的扩散阻挡层的有效性也被削弱。在150/spl度/C下,在500小时的球剪试验中,所有样品的焊料内部都出现了延展性破坏,这表明焊料与UBM之间的结合相对较好。从这些结果可以看出,Au对Ni稳定性的不利影响不如Ni/Au基底金属化对Ni稳定性的不利影响显著。衬底表面的Ni也可能在钎料与Al/Ni(V)/Cu UBM之间的界面反应中起重要作用。
Effect of Au on interfacial reactions of eutectic SnPb and SnAgCu solders with Al/Ni(V)/Cu thin film metallization
Effect of various amounts of Au on the interfacial reactions of SnPb and SnAgCu solders and Al/Ni(V)/Cu underbump metallurgy were investigated after high temperature storage and multiple reflows. During high temperature storage, the presence of Au varied the formation of intermetallic compounds at solder/UBM interfaces from a binary Cu/sub 6/Sn/sub 5/ phase to a ternary Cu-Sn-Au or quarternary Cu-Sn-Ni-Au phase. The phase transformation was a diffusion controlled process, which was influenced by Au amount, aging temperature and solder composition. The effectiveness of the diffusion barrier layer of UBM was also weakened, since Ni and Sri could diffuse and react through a ternary or quarternary phase. Up to 500 hours at 150/spl deg/C all samples showed a ductile failure inside solder under the ball shear test, which indicated a relatively good bonding between the solder and UBM. From these results it was concluded that detrimental effect of Au on the stability of Ni was not as significant as that of Ni/Au substrate metallization. Ni from substrate finish may also play an important role in the interfacial reaction between the solder and Al/Ni(V)/Cu UBM.