超黑镍磷合金光学吸收器

S. Kodama, M. Horiuchi, K. Kuroda, T. Kunii
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引用次数: 48

摘要

为了开发一种用于光功率测量的光学吸收剂,作者研究和评价了镍磷合金的超黑膜,并使用化学镀工艺将其镀和蚀刻在衬底上。考察了镀液和蚀刻液的组成和条件。对薄膜的光谱反射率和表面形貌进行了精确测量。在488 ~ 1550 nm波长范围内,光谱反射率约为0.1% ~ 0.2%,波长依赖性较低。将吸收剂暴露在两种加速老化环境中:(a)在100℃的干燥(1% ~ 2%相对湿度)环境中2000小时,(b)在85℃的潮湿(85%相对湿度)环境中2000小时。暴露(a)后,吸收剂的光谱反射率略有增加,但在上波长范围内保持0.18% ~ 0.23%的优异水平。曝光后(b),光谱反射率和波长依赖性几乎没有变化。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Ultra-black nickel-phosphorus alloy optical absorber
In order to develop an optical absorber for use in the measurement of optical power, the authors investigated and evaluated ultra-black films of nickel-phosphorus alloy, which were plated and etched on substrates using an electroless plating process. The plating and etching bath components and conditions were examined. The spectral reflectances and surface morphologies of the films were measured precisely. An optical absorber with a spectral reflectance of about 0.1% to 0.2% and a low wavelength dependence in the wavelength range of 488 to 1550 nm has been developed. The absorber was exposed to two accelerated-aging environments: (a) 2000 hours in a dry (1% to 2% relative humidity) environment at 100 degrees C, and (b) 2000 hours in a damp (85% relative humidity) environment at 85 degrees C. After exposure (a), the spectral reflectance of the absorber increased slightly, but it retained an excellent level of 0.18% to 0.23% in the upper wavelength range. After exposure (b), the spectral reflectance and wavelength dependence showed almost no change.<>
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