钯-硅氧烷膜表面等离子体共振检测氢

2011 SBMO/IEEE MTT-S International Microwave and Optoelectronics Conference (IMOC 2011) Pub Date : 2011-10-01 DOI:10.1109/IMOC.2011.6169322

G. O. Cavalcanti, E. Fontana, Antonio Azevedo

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引用次数: 2

摘要

我们研究了基于表面等离子体共振(SPR)效应的氢传感器在硅氧烷衬底上的Pd薄膜的性能。采用Kretschmann棱镜耦合结构，对裸玻璃和预涂硅氧烷的玻璃上溅射Pd膜的反射率进行了测量。在大部分Pd厚度范围内，裸玻璃对H2的检测灵敏度高于Pd-硅氧烷，后者的最大灵敏度与裸Pd相匹配。对两种多层结构的灵敏度数据的直接比较表明，在更高的厚度值下，硅氧化钯膜对H2的灵敏度有提高的趋势。

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Hydrogen detection using surface plasmon resonance on palladium-siloxane films

We investigate the performance of Pd films on siloxane underlayer for the development of H2 sensors based on the surface plasmon resonance (SPR) effect. Reflectance measurements were carried out on sputtered Pd films on bare glass and on glass pre-coated with a siloxane layer, using Kretschmann's prism coupling configuration. For most of the range of Pd thicknesses investigated, the sensitivity for H2 detection on bare glass was higher than that on Pd-siloxane, with the maximum sensitivity for the latter matching that on bare Pd. A direct comparison between the sensitivity data for the two multilayer configurations, indicates a trend of improved sensitivity for H2 at higher thickness values for the siloxinated palladium films.

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来源期刊

2011 SBMO/IEEE MTT-S International Microwave and Optoelectronics Conference (IMOC 2011)

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