绝缘体上硅表面等离子体干涉仪:集成生物传感器的新概念

P. Debackere, S. Scheerlinck, P. Bienstman, R. Baets
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引用次数: 63

摘要

我们提出了一种高度集成和高灵敏度的光学生物传感器的新结构。我们的传感器的基本元件是一个表面等离子体干涉仪,由嵌入在硅膜中的一层薄薄的金组成。我们利用本征模展开的仿真方法研究了传感器的性能。我们计算出10-6 RIU(折射率单位)量级的折射率变化对于长度为10微米的元件是可检测的。此外,我们还说明了我们的传感器的工作波长可以调到一个所需的波长,以适应广泛的环境折射率,使我们的设备适用于化学和生物传感
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Surface Plasmon Interferometer in Silicon-on-Insulator: Novel Concept for an Integrated Biosensor
We propose a novel configuration for a highly integrated and highly sensitive optical biosensor. The basic element of our sensor is a surface plasmon interferometer consisting of a thin layer of gold embedded in a silicon membrane. We investigate the performance of our sensor by simulation using eigenmode expansion. We calculate that refractive index changes in the order of 10-6 RIU (refractive index unit) are detectable for a component of length 10 mum. Moreover, we illustrate that the operation wavelength of our sensor can be tuned to a desired wavelength for a wide range of environmental refractive indices, making our device suitable for chemo- and biosensing
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