{"title":"拉格朗日组态在静电驱动MEMS谐振器分析中的应用","authors":"L. Arapan, B. Dulmet","doi":"10.1109/EFTF.2014.7331490","DOIUrl":null,"url":null,"abstract":"This paper proposes an example of application of Lagrange configuration to the modelling of the electrostatically- driven vibrations of a silicon bar in flexure modes. Mapping an acousto-elastic problem onto the material coordinates of a well-known reference configuration is appropriate to analyze problems in finite deformation and is an excellent tool to model electrostatically-driven MEMS resonators. The paper presents an application of this approach to the analysis of a flexural resonator.","PeriodicalId":129873,"journal":{"name":"2014 European Frequency and Time Forum (EFTF)","volume":"151 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2014-06-23","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Application of Lagrangian configuration to the analysis of electrostatically-driven MEMS resonators\",\"authors\":\"L. Arapan, B. Dulmet\",\"doi\":\"10.1109/EFTF.2014.7331490\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"This paper proposes an example of application of Lagrange configuration to the modelling of the electrostatically- driven vibrations of a silicon bar in flexure modes. Mapping an acousto-elastic problem onto the material coordinates of a well-known reference configuration is appropriate to analyze problems in finite deformation and is an excellent tool to model electrostatically-driven MEMS resonators. The paper presents an application of this approach to the analysis of a flexural resonator.\",\"PeriodicalId\":129873,\"journal\":{\"name\":\"2014 European Frequency and Time Forum (EFTF)\",\"volume\":\"151 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2014-06-23\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2014 European Frequency and Time Forum (EFTF)\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/EFTF.2014.7331490\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2014 European Frequency and Time Forum (EFTF)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/EFTF.2014.7331490","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
Application of Lagrangian configuration to the analysis of electrostatically-driven MEMS resonators
This paper proposes an example of application of Lagrange configuration to the modelling of the electrostatically- driven vibrations of a silicon bar in flexure modes. Mapping an acousto-elastic problem onto the material coordinates of a well-known reference configuration is appropriate to analyze problems in finite deformation and is an excellent tool to model electrostatically-driven MEMS resonators. The paper presents an application of this approach to the analysis of a flexural resonator.
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