快速声光流多焦点激光系统的设计、实现与表征

A. Zunino, S. Surdo, M. Duocastella
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引用次数: 0

摘要

基于激光的系统是光学成像和材料加工等几个研究和工业领域的基本工具。它们赋予高精度和灵活性,但是,这些过程的吞吐量受到其固有的点扫描性质的限制。解决这一问题的有效方法是光束并行化,但目前的实现存在灵活性不足、响应时间长或光学像差等问题。为了克服这些问题,我们提出了一种原始的声光流(AOF)装置,该装置利用液体中的机械振动来衍射多光束的梳状光。在这项工作中,我们详细介绍了基于aofs的多焦点激光系统的设计、实现和光学特性。特别地,我们证明了声学产生的光束的主要特征可以通过适当地改变机械振荡的频率、幅度和相位来调谐。将该器件应用于激光直写,将使各种材料的高通量加工成为一种高度可调的方式。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Design, implementation, and characterization of a fast acousto-optofluidic multi-focal laser system
Laser-based systems are fundamental tools in several research and industrial fields as important as optical imaging and material processing. They grant high precision and flexibility, though, the throughput of these processes is constrained by their inherent point-scanning nature. An effective solution to this problem is beam parallelization, though, current implementations suffer from lack of flexibility, long response time or optical aberrations. In order to overcome these issues, we propose an original acousto-optofludic (AOF) device that exploits mechanical vibrations in a liquid to diffract light in a comb of multiple beams. In this work, we detail design, implementation, and optical characterization of AOF-based multi-focal laser system. In particular, we show that the main features of the acoustically generated beamlets can be tuned by properly varying frequency, amplitude, and phase of the mechanical oscillations. The application of this device to laser direct writing will enable high throughput processes of various materials in an highly tunable way.
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