高电子迁移率晶体管的热输运:玻尔兹曼输运方程研究

A. Vallabhaneni, M. Gupta, Satish Kumar
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引用次数: 0

摘要

基于AlGaN/GaN的高电子迁移率晶体管(ag - hemt)是未来高功率和高频应用的有力候选者。但这些局部区域的热点和高温的形成,由于性能下降和击穿,限制了它们的应用。了解潜在的热传递过程将是解决这些器件散热挑战的重要一步。本研究的目的是建立基于玻尔兹曼输运方程(BTE)的多尺度热输运模型,以准确预测给定偏置电压下的热点温度。目前,还没有可靠的模型来预测这些器件中热点附近的能量(温度)分布。建立了耦合电热模型,提取了热点位置和耗散功率的关键信息。利用这些信息进一步利用基于BTE的模型来研究器件的热性能,该模型可以详细地了解热点中声子输运的非平衡性质。采用扩散失配模型(DMM)处理氮化镓与硅衬底之间的界面。我们计算了硅衬底GaN器件的空间温度分布,并估计了热点的最高温度。我们还比较了BTE模型和傅立叶模型对温度分布的估计,发现傅立叶模型对热点温度的预测明显不足。该多尺度模型可用于研究多指器件中的热传输,并探讨不同指间的串扰对器件的影响。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Thermal transport in high electron mobility transistors: A Boltzmann transport equation study
AlGaN/GaN based high electron mobility transistors (AG-HEMTs) are strong candidates for the future high power and high frequency applications. But the formation of hot-spots and high temperature in these localized regions can limit their applications due to performance degradation and break-down. Understanding the underlying thermal transport processes will be an important step towards solving heat dissipation challenges in these devices. The objectives of the current study is to develop a multi-scale thermal transport model based on Boltzmann Transport Equation (BTE) to predict the hot-spot temperature accurately for a given bias voltage. At present, there are no reliable models to predict the energy (temperature) distribution near the hot spot in these devices. We developed coupled electro-thermal model to extract key information about hot-spot location and dissipated power. This information is further utilized to investigate the thermal performance of the device using BTE based model which can provide detailed view of the non-equilibrium nature of the phonon transport in the hot-spot. The interface between GaN and silicon substrate is treated with diffusive mismatch model (DMM). We calculated the spatial temperature distribution in a GaN device on silicon substrate and estimated the maximum temperature of hot spots. We also compared BTE and Fourier models for estimating the temperature distribution and found that Fourier model would significantly under predict the hot spot temperature. The multi-scale model can be used to investigate thermal transport in multi-finger devices and to explore the effect of cross-talk between different fingers.
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