宽入射角、低偏振像差边缘滤波器

Shikun He, Gang Wang, Yuming Zhou, Ji-you Zhang, Qiaolin Huang, Li Wang
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摘要

目前,为了提高光学系统的紧凑性,光学元件常常是共用的,边缘滤光片是其中的核心部件之一。对于同一光谱系统,当半会聚光入射到边缘滤光片上时,矢状和子午线的入射角范围不同,导致两个方向的偏振特性不同,不利于光学系统的MTF。为了提高图像质量,分析了影响MTF的各种因素。当光入射到边缘滤光片上时,P偏振和S偏振的反射相位差会导致MTF下降。对边缘滤波器的设计过程进行了优化。同时对光谱和反射相位进行优化。当边缘滤波器达到频谱要求时,P偏振和S偏振反射相位的变化保持在一定范围内。将新设计的边缘滤波器粘贴在光学系统上,并进行了仿真。计算结果表明,新设计的边缘滤波器对MTF的影响很小。采用离子辅助电子束蒸发法沉积边缘滤波多层膜,测量结果与设计结果吻合较好。提出了一种设计宽入射角、低偏振像差边缘滤波器的新方法。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Wide-incident angle and low polarization aberration edge filter
Nowadays, optical elements are often shared in order to improve compactness of optical system and edge filter is one of the core parts. For same spectral system, when half convergence light incidents on edge filter, Sagittal and meridian will have different incident angle range, which cause different polarization characterization for the two directions and is harmful to the optical system’ MTF. In order to improve image quality, all factors affecting MTF are analyzed. When light incidents on edge filter, the difference between P and S polarization’s reflection phase can cause MTF drop. The design process of edge filter is optimized. Optical spectrum and reflection phase are optimized together. The variation is kept in a certain range for reflection phase of P and S polarization when edge filer attains spectrum requirement. The newly designed edge filter is sticked to optical system and carried out simulation. The calculation results showed that the newly designed edge filter has little effect on MTF. Ion-assisted e-beam evaporation method is used to deposit edge filter multilayer and the measurement result is in good accordance with that of the design. We think that a new design method is raised for design wide-incident angle and low polarization aberration edge filter.
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