高功率性能的低密度Nano-columnar二氧化硅电影全石英镜

Optical Interference Coatings Conference (OIC) 2019 Pub Date : 2019-06-02 DOI:10.1364/OIC.2019.TD.3

Phyo Lin, J. Randi, S. DeFrances, D. Bernot, J. Talghader

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引用次数: 0

摘要

采用斜角沉积法制备了SiO2纳米柱状薄膜，并对其光学性能和力学性能进行了表征。薄膜表现出高损伤阈值，低散射，以及在低密度下向低应力的有趣转变。

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High Power Properties of Low Density Nano-columnar SiO2 Films for All-Silica Mirrors

SiO2 nano-columnar films were fabricated using oblique angle deposition and characterized for their optical and mechanical properties. The films showed high damage thresholds, low scattering, and an intriguing transition to low stress at lower densities.

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Optical Interference Coatings Conference (OIC) 2019

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