{"title":"高阻硅制MOS电容器的光电应用","authors":"O. Malik, F. J. De la Hidalga-W, E. Meza-P","doi":"10.1109/ICSENST.2011.6136993","DOIUrl":null,"url":null,"abstract":"Optoelectronic applications of MOS capacitors, fabricated on high resistivity silicon substrate, and operating in non-equilibrium mode under a triangular voltage sweep are analyzed. It is found that those MOS capacitors behave as sensitive optical sensors with direct (without analog-digital conversion) quasi-digital output in the form of a pulse-width-modulated signal, duty of which depends on the light intensity. Capacitor-based optical sensors are promising for automatic control, robotic, and metrological applications.","PeriodicalId":202062,"journal":{"name":"2011 Fifth International Conference on Sensing Technology","volume":"93 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2011-11-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"1","resultStr":"{\"title\":\"Optoelectronic applications of MOS capacitors fabricated on high resistivity silicon\",\"authors\":\"O. Malik, F. J. De la Hidalga-W, E. Meza-P\",\"doi\":\"10.1109/ICSENST.2011.6136993\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"Optoelectronic applications of MOS capacitors, fabricated on high resistivity silicon substrate, and operating in non-equilibrium mode under a triangular voltage sweep are analyzed. It is found that those MOS capacitors behave as sensitive optical sensors with direct (without analog-digital conversion) quasi-digital output in the form of a pulse-width-modulated signal, duty of which depends on the light intensity. Capacitor-based optical sensors are promising for automatic control, robotic, and metrological applications.\",\"PeriodicalId\":202062,\"journal\":{\"name\":\"2011 Fifth International Conference on Sensing Technology\",\"volume\":\"93 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2011-11-01\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"1\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2011 Fifth International Conference on Sensing Technology\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/ICSENST.2011.6136993\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2011 Fifth International Conference on Sensing Technology","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/ICSENST.2011.6136993","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
Optoelectronic applications of MOS capacitors fabricated on high resistivity silicon
Optoelectronic applications of MOS capacitors, fabricated on high resistivity silicon substrate, and operating in non-equilibrium mode under a triangular voltage sweep are analyzed. It is found that those MOS capacitors behave as sensitive optical sensors with direct (without analog-digital conversion) quasi-digital output in the form of a pulse-width-modulated signal, duty of which depends on the light intensity. Capacitor-based optical sensors are promising for automatic control, robotic, and metrological applications.
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