如何在目标生命周期内运行可靠的反应性HIPIMS进程

{"title":"如何在目标生命周期内运行可靠的反应性HIPIMS进程","authors":"T. Schütte","doi":"10.14332/svc19.proc.0033","DOIUrl":null,"url":null,"abstract":"","PeriodicalId":220126,"journal":{"name":"Annual Technical Conference Proceedings","volume":"102 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2019-09-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"How to Run a Reliable Reactive HIPIMS Process over a Target Lifetime\",\"authors\":\"T. Schütte\",\"doi\":\"10.14332/svc19.proc.0033\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"\",\"PeriodicalId\":220126,\"journal\":{\"name\":\"Annual Technical Conference Proceedings\",\"volume\":\"102 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2019-09-01\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Annual Technical Conference Proceedings\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.14332/svc19.proc.0033\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Annual Technical Conference Proceedings","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.14332/svc19.proc.0033","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}