Film Bulk Acoustic Wave Resonator in Rf Filters

Film Bulk Acoustic Resonator (FBAR)is widely used as a RF filter in advanced wireless communication system because of its high-Quality Factor (Q)and low inband losses. FBAR is also widely used as a sensor for biomedical and physical sensing. This paper describes the basic concepts of FBAR, device architecture, and the topology used to design the filter. Furthermore, we have proposed the design of 3D-FBAR based on cavity device architecture which can be used to design a RF-filter. In this design, aluminum (A1)is used as a top as well as for the bottom electrode the top electrode is hexahedron in shape, aluminum nitride (AIN)as a piezoelectric and silicon (Si)is used as a substrate. The designed model is to analyses maximum pressure of FBAR in its operating region, the resonant frequency fr which is 2.76 GHz and anti-resonant frequency fa which is 2.78 GHz and Q-factor is 730.