Silicon Microsystems for Automotive Applications

The integration of microelectronic and micromechanical devices into one system the microsystem technology is rapidly gaining importance in automobiles. According to market studies the content of electronics as well as of microsystems in automobiles is increasing more than proportionally. The major driving forces are the environmental requirements, safety and comfort. The microsystem technology contributes in these areas due to the reduction of costs, weight and size as well as improved reliability and functionality. Sensor systems for the measurement of manifold air intake pressure, mass flow, acceleration for ABS and airbag and yaw rate will be discussed in detail. In the nineties a new technology, the surface micromachining, is emerging. This technology is being made available to small and medium size companies as well as to universities and research institutes by a foundry-service-scheme sponsored by the European Union.